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CM-4 Simple Economic Teaching Probe Station
The CM series probe stations feature a compact design, deliver high measurement accuracy, offer convenient operation, and are ergonomically designed for user comfort.
Primarily used for I-V/C-V PIV testing, as well as in testing within the semiconductor and optoelectronics industries.
Widely used in the research and development of precision electrical measurements for complex, high-speed devices.
CM Series Simple Probe Station
- Description
- Parameters
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Application
- Primarily used for I-V/C-V PIV testing, as well as testing in the semiconductor and optoelectronics industries.
- Widely used in the R&D of precision electrical measurements for complex, high-speed devices
Ergonomics and Optional Features
- Adjustable needle holder platform allows for quick lifting and lowering, enabling rapid separation of samples and probes.
- Chuck rotates and locks in place
- The needle holder platform accommodates DC/RF positioners.
- Offering a variety of configurations, including multiple chuck options, micro-positioners, microscopes, cameras, PCB holders, and more.
- Optional instrument racks, vibration isolation tables, dark boxes, and more
Description
4" chuck, with central vacuum hole and multi-ring vacuum adsorption for securing samples, controlled by 3 independent switches.
• Base X-Y axis movement range: 2" x 3" (50.8mm x 76.2mm), precision: 10μm.
• Chuck can rotate 360 degrees, fine adjustment precision no greater than 0.1 degrees, with a locking knob.
• Microscope with a rotary design around a column, enabling quick movement, with a movement range covering the sample stage.
• Overall dimensions: 400W*370D*490H (for reference only).
• Weight: 18KG. -
Technical specifications Model CM-4 Truncated pyramid Chuck size 4 inches Sample stage rotation Rotates 360 degrees, with fine adjustment capability of 15 degrees and precision down to 0.1 degree—equipped with an angle-lock mechanism. Sample Fixing Method Vacuum adsorption, central suction port, multi-ring adsorption ring X-Y Travel Distance 2 inches x 3 inches X-Y Motion Accuracy 10um Needle holder platform One needle holder platform on each side, capable of holding up to 6 small probe holders. Back Electrode Testing The sample stage is electrically isolated and suspended, with a 4mm jack available for connecting the back electrode (optional). Microscope Microscope Mounting Method Pillar-rotating type Microscope Types Single-lens microscope Stereo Microscope Magnification power 0.75x-5x zoom 16X-100X Light source Coaxial light source External LED Ring Light CCD 2-megapixel (upgradeable to 20-megapixels) Probe holder X-Y-Z Travel Distance 12mm x 12mm x 12mm / 20mm x 20mm x 20mm Mobile precision 10um/2um/0.7um/0.5um Adsorption method Magnetic adsorption / Vacuum adsorption Probe Fixture Cables Coaxial cable / Triaxial cable / RF cable Leakage current accuracy 10pA/100fA/10fA Fixed probe Spring fixation / Tubular fixation / Claw-type fixation Connector Type BNC / Three-axis / Banana Plug / Alligator Clip / Terminal Block / RF Connector Probe DC needle tip diameter lum/2um/5um/10um/20um/50um/100um RF probe frequency 40GHz/50GHz/67GHz/110GHz Material Tungsten steel / Beryllium copper / Nickel-plated External dimensions 400W x 370D x 490H Weight Approximately 18 kilograms Optional accessories Heating stage Gold-plated chuck Seismic-resistant desk Shielding box Customized according to customer requirements Wafer Chuck( Standard)
Connectivity
Coaxial BNC (m)
Diameter
203mm
Material
Nickel-plated Oxygen-Free Copper (gold plating optional)
Chuck Surface
Zone Selector Knob with Pinhole Vacuum Pattern
Vacuum Hole Pattern Cross Section (Diameter)
Centers，1in，4in，6in，8in
Vacuum Actuator
Selector Knob Allows Individual Activation of Vacuum Zones
Supported DUT sizes
10mm、25mm、100mm、150mm、200mm
Surface flatness
±5µm
Rigidity
<3µm / 10N at chuck edge
Electrical Specifications (Coaxial Cable)
Operating Voltage
Designed for operation at -200V to + 200V DC
Maximum voltage between top of chuck and GND
10K V DC
Resistance to ground
> 150 GΩ
Wafer Chucks (Tri-Axis)
Connectivity
Triax (m)
Diameter
203mm
Material
Gold-plated brass
Chuck surface
Separate vacuum zone with pinhole vacuum pattern
Vacuum Hole Pattern Cross Section (Diameter)
Center，1in，4in，6in，8in
Vacuum Drive
Multi-zone adjustable control
Supported DUT sizes
10mm、25mm、100mm、150mm、200mm
Surface Flatness
± 5 Microns(µm)
Rigidity
<3µm / 10N Near chuck edge
High Temperature Chucks
200mm
200mm Triax
200mm 3kV Triax
Temperature Range
+25°C ~+300°C
+25°C ~ +200°C
+25°C ~+200°C
Connectivity
Coaxial Cable (m)
Triax (m)
SHV Triax (m)
Temperature Control
Liquid Cooling/Resistance Heater
Coolant
Water
Minimum temperature selection step
0.1°C
0.1°C
0.1°C
Chuck Temperature Display Resolution
0.01°C
0.01°C
0.01°C
Temperature Stability
±0.1°C
±0.1°C
±0.1°C
Temperature Accuracy
±0.5°C
±0.5°C
±0.5°C
Controls
Low noise DC/PID
Interface
RS485
RS485
RS485
Chuck Surface Plating
Nickel
Gold
Temperature Sensor
Thermistor
Temperature Uniformity
±0.5°C @ ≤ 200°C
±1. °C @> 200°C
±0.5°C ≤ 100°C
±2.5°C ≤ 200°C
±0.5°C ≤ 100°C
±3.5°C ≤ 200°C
Surface Flatness
< ±1 µm
< ±5µm
< ±10µm
Electrical isolation - Coax BNC (m) / SHV Triax
150nA
> 5TΩ
> 5TΩ
Heating rate
25°C ~ 300°C < 12 Min.
25°C ~200°C < 9 Min.
25°C ~ 200°C < 28 Min.
Leakage@ 10V Kelvin Triax
N/A
<100fA
<10pA
Maximum voltage between top of chuck and GND
500V
500V
3kV
Safety circuits
Yes
Yes
Yes
Vacuum mode
Rings
Rings
Rings
Vacuum zone (DUT size)
50、100、150、200mm
50、100、150、200mm
50、100、150、200mm