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FS-Pro Semiconductor Parameter Tester
Integrated Testing
Ultra-fast
Modular Architecture
Easy to operate
Unique 1/f noise testing capability
Testing instrument
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√ Integrated Testing
FS-Pro™ integrates DC testing, pulse testing, transient testing, capacitance testing, and low-frequency noise (1/f noise) testing into a single instrument, enabling complete low-frequency parameter characterization without the need to change cables or re-probe.
√ Ultra-fast
FS-Pro™ introduces AI-powered testing technology, delivering test speeds up to 10 times faster than traditional semiconductor parameter testing systems—while maintaining unmatched testing accuracy even at this enhanced speed.
√ Modular Architecture
FS-Pro™ features a modular architecture that allows for scalable expansion while maintaining a compact form factor, and it supports multi-channel parallel testing—up to 20 channels—to effortlessly handle high-density production testing.
√ Easy to operate
The built-in measurement control software, LabExpress™, features an intuitive graphical user interface that allows users to perform powerful test and analysis functions with just a few mouse clicks. It also supports a wide range of equipment, including various probe stations and matrix switches, enabling seamless automation of wafer-level data testing tasks. Best of all, it offers a comprehensive solution specifically tailored for semiconductor manufacturing.
√ Unique 1/f noise testing capability
Especially for advanced process devices, two-dimensional material devices, and optoelectronic detectors, 1/f noise serves as one of the intrinsic and critical parameters of these devices. The performance of 1/f noise directly determines a device's practical application capabilities. Widely present in semiconductor devices across various materials and structures, 1/f noise also sensitively reveals many hidden defects in both materials and devices. As a result, measuring and analyzing 1/f noise has emerged as a powerful new tool for assessing semiconductor device quality, characterization, and reliability.
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Key Component Performance Metrics
FS380 High-Precision Source Measurement Unit (SMU)
● DC Testing
±200V/1A measurement range, with up to 200W output power, minimum current measurement accuracy of 30 fA, voltage measurement accuracy of 30 µV, and four-quadrant operation.
● Pulse testing
±200V / 3A measurement range, with a maximum output power of 480W, minimum current measurement accuracy of 5 pA, voltage measurement accuracy as low as 30 µV, and a minimum pulse width of 50 µs.
● Transient Testing
Arbitrary waveform output with a maximum sampling rate of 1.8 MS/s and a minimum time step of 10 µs.
● Capacitance Testing (CV)
±200V/1A measurement range, 10Hz–10kHz bandwidth, and a measurement capability from 20fF to 1mF
● 1/f Noise Testing
Bandwidth: 0.1 Hz to 100 kHz, with a 1 × 10⁻²⁸ A²/Hz background noise level, 200 V bias, and a test speed of 8 seconds per bias.
FS336 External LCR Module
● Capacitance Testing (CV, CF)
● ±40V range, 40Hz–8MHz bandwidth
● Measurement range of 100 fF to 10 mF
Labexpress Graphical Testing Software
LabExpress™ measurement software offers comprehensive DC, pulse, transient, capacitance, and noise testing capabilities. It comes with a built-in library of common MOSFET, BJT, diode, resistor, and capacitor device types, providing a wide range of versatile test options—making it easy for even beginners with no prior device knowledge to get started. Additionally, LabExpress™ delivers a complete solution tailored specifically for the daily needs of semiconductor wafer fabs. When it comes to test data analysis, LabExpress™ doesn’t lag behind either. With its robust curve transformation and plotting features, along with convenient algebraic operations, analyzing results in real time has never been simpler.
Industry Usage
In the industrial sector, FS-Pro™ has already been adopted by several globally leading design firms, as well as semiconductor foundries, IDMs, and design companies—demonstrating exceptional precision, speed, and reliability that have successfully passed rigorous industry certifications. Meanwhile, in the research community, FS-Pro™ has been embraced by dozens of universities and research institutions, supporting the publication of numerous cutting-edge academic papers to date. Low-frequency noise, recognized increasingly by scholars as an effective non-destructive experimental tool, is becoming a go-to method for many researchers. As the only semiconductor parameter analyzer integrated with advanced noise-testing capabilities, FS-Pro™ is playing an indispensable role in the development of next-generation materials and devices at the forefront of innovation.