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CRX-SM Low-Temperature Superconducting Vacuum Probe Station


Temperature range: 8K–300K

Extreme vacuum better than 5 x 10⁻⁶ Torr

Supports 6 probe arms and DC measurements, with leakage current accuracy better than 100 fA.

Supports RF testing with a frequency range of DC to 110 GHz.

Supports optical testing, wavelength range: 190 nm to 2200 nm

Hall measurements and magnetotransport measurements

Magnet type: Superconducting magnet

Category:

CRX Series Closed-Loop Vacuum High-Low Temperature Probe Station

  • Description
  • Parameters
  • Download
  • Video
  • CRX-4.5K Semiconductor Device Testing Probe Station
    Using a closed-loop refrigeration mechanism for cooling: 4K base temperature, temperature range: 4.5K to 350K
    Sample table size: 2 inches
    The sample stage is electrically independent and suspended, leading out a tri-coaxial interface
    Heater: Sample stage heater 50W, shielded chamber heater 100W
    Anti infrared radiation window
    Four temperature sensors are installed on the sample stage, shielding chamber, cold head, and probe arm respectively
    6 probe arm interfaces (compatible with DC arm, fiber arm, RF arm)
    The RF arm can support a frequency range of DC~110GHz
    DC arm leakage accuracy is better than 100fA
    The ultimate vacuum is better than 10-5Pa
    Integrated shock absorber bracket
    Size: 872 * 962 * 1400
    Weight: 130KG

    Features

      2 inch sample stage

      Temperature range: 8K-300K

      Vertical superconducting magnetic field

      Vertical magnetic field strength in the whole temperature range: ±3T

      6 probe arm interfaces

      Allow unsupervised cooling

      Cycleelectricity Refrigeration, no refrigerant required 

      One-button cooling, one-button temperature recovery, automatic temperature control, automatic field control

     Automatic test function

     

    Description 

     The CRX-SM low-temperature superconducting probe station adds a ±3T vertical superconducting magnet to the closed-loop probe station. 

     Application areas include: IV / CV / microwave / photoelectric experimental test / superconducting vertical magnetic field measurement / low temperature test;

    It allows researchers to perform Hall measurements and magnetotransport measurements;

     Allow unsupervised cooling: cooling can be performed without the need for users to monitor all the time;

     The vibration amplitude of the sample holder is controlled within ≤1um;

     6 probe arm interfaces are compatible with DC arm, RF arm, and fiber optic arm;

     At room temperature,the ultimate vacuum is <7×10^-4 (Torr); at low temperature, the ultimate vacuum is <7×10^-6 (Torr);Temperature control stability: better than ±10mK

  • --Key technical parameters

    Temperature range

    8K~300K

    Sample stage size

    2 inches

    Sample stage vibration amplitude

    1um

    Sample stage type

    Grounded sample stage (upgradeable to coaxial sample stage, triaxial sample stage)

    Magnet Type

    Superconducting magnets

    Magnetic field direction

    vertical

    Magnetic field control

    Current control

    Magnetic field size

    ±3T (8K~300K full temperature range)

    Magnetic field homogeneity

    0.5% 10mm diameter; 1% 25mm diameter

    Temperature Sensor

    7

    Temperature control stability

    <10 K @ ±50 mK

    10 K to 100 K @ ±10 mK

    100 K to 300 K @ ±10 mK

    Vacuum chamber

    Dimensions: 325mm outer diameter x 477mm high

    Observation window diameter

    50mm

    Probe arm interface

    6 probe arm interfaces (compatible with DC arm, fiber optic arm, RF arm)

    Vacuum degree

    30 min (to reach <5 × 10-3 Torr)

    At room temperature, the ultimate vacuum is <7×10^-4 (Torr)

    At low temperature, the ultimate vacuum is <7×10^-7 (Torr)

    Probe station cooling time (8K)

    15h

    Probe station temperature recovery time (290K)

    18h (upgradeable heating module, temperature recovery time is better than 4h)

    software

    With control software, one-key cooling, one-key temperature return, automatic temperature control, automatic field control

    software

    Upgradable automatic test software

    Dimensions (L x W x H)

    Dimensions: 872x962x1400mm (including microscope)

    weight

    Weight: 300KG (single unit)

     

     

     

     

    vProbe Arm Module(Probe arm + probe fixture + probe) 

     

    Probe Arm 

    DC arm CB-80-N

    Fiber Optic Arm CB-80-F

    RF Arm CB-80-RF

     

    DC arm

    Suitable for DC probes

    RF Arm

    Suitable for installing radio frequency probes (with R-axis rotation function to help the radio frequency probes to level quickly)

    Fiber Optic Arm

    Suitable for loading optical fiber into the cavity to irradiate the sample

    Probe arm X-Y-Z travel range

    25mm-70mm-15mm

    R axis rotation angle

    360 degree coarse adjustment, fine adjustment±7.5 (RF arm only)

    Movement accuracy

    ±2um

     

    Probe fixture

     

    Ceramic probe fixture

    RF Probe Fixture

    Fiber Optic Clamp

     

    Maximum voltage

    200V

    50V

    Fiber Fixing Clamp

    Maximum current

    1A

    2A

    Leakage Current

    100fA

    100fA

    Connectors

    SMA

    2.92/2.4/1.85/1.0mm

    Matching probe type

    Low temperature ceramic probe

    40/50/60/110GHz probes

    Probe tip material

    Tungsten/Beryllium Copper

    Beryllium copper/nickel plated/tungsten

    Probe tip radius

    0.520um

    20um

    Application

    DC test

    High frequency testing

     

     

     

    Ceramic probe

    design

    Heat sink design

    Material

    Tungsten / Beryllium Copper

    Tip radius

    5um / 10um / 25um

    magnetic

    Non-magnetic / Magnetic

    RF Probes - Selection Guide

    RF probe

     

    40A

    50A

    67A

    frequency

    DC-40GHz

    DC-50GHz

    DC-67GHz

    Connectors

    2.92mm

    2.4mm

    1.85mm

    Pin structure

    GS/SG/GSG

    GS/SG/GSG

    GS/SG/GSG

    Spacing range

    25µ - 2540µ

    25µ - 1250µ

    25µ - 1250µ

    Insertion loss

    <.8db

    <1.0db

    <1.1db

    Return loss

    > 18db

    >18db

    >14db