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CL-6 Mid-End Probe Station


Cindbest high-power device characterization system is specifically designed for testing high-power devices directly on wafers.

The Cindbest probe station systems offer complete solutions for both 150 mm and 200 mm wafers.

They are designed to enable low-contact-resistance measurements of power semiconductors across a wide temperature range.

Category:

CL Series Mid-Range Probe Station

  • Description
  • Parameters
  • Download
  • Video
  • Application

    • Can be used for optoelectronic testing applications, including light intensity and wavelength measurements for LEDs, LDs, and PDs.
    • RF testing is available, with the option to install East/West-facing pin connectors—ideal for general use in university laboratories.

     

    vPD laser machine

     

    Used for metal cutting inside the chip, Mark point marking

     

    Three-band laser

    Wavelengths include 1064nm, 532nm, 355nm

    Repetition frequency: internal trigger 1Hz; external trigger is possible

    Laser energy: 1mJ

    Light scattered eastward: 5~6mrad

    Laser pulse width:--10 ns

    Cooling method: air cooling

    Built-in CCD camera

    Minimum cutting size: 2um

    Warranty: One year

    Lifespan:>3 million times

     

    Ergonomics and optional features

    • Adjustable needle holder platform enables quick lifting and lowering, facilitating rapid separation of samples and probes.
    • Chuck rotates and locks in place
    • The needle holder platform accommodates DC/RF positioners (magnetic or vacuum-mounted).
    • Offering a variety of configurations, including multiple chuck options, micro-positioners, microscopes, cameras, PCB holders, and more.
    • Optional instrument racks, vibration isolation tables, dark boxes, and more

     

    Description

     

    •  6" chuck, with central vacuum hole and multi-ring vacuum adsorption for securing samples, controlled by 3 independent switches.
    •  X-Y movement range of the chuck: 6'' X 6'', movement precision: 10 microns.
    •  Chuck can rotate 360 degrees, fine adjustment precision no greater than 0.1 degrees, equipped with a locking knob.
    •  Chuck Z-axis lift, with a travel range of 8mm, fine adjustment precision of 2μm, and a locking mechanism.
    •  Microscope with a rotary design around a column, enabling quick movement, with a movement range covering the sample stage.
    •  Overall dimensions:580mm x530mm x690mm (with microscope)
    •  Weight: About 80kg

  • Technical specificationsModelCL-6
    Truncated pyramidChuck size6 inches
    Sample stage drawerQuick pull
    Sample stage rotationRotates 360 degrees, with fine adjustment capability of 15 degrees and precision down to 0.1 degree—equipped with an angle-lock mechanism.
    Sample Fixing MethodVacuum adsorption, central suction port, multi-ring adsorption ring
    Sample stage Z-axis lifting and loweringAdjustable by 8mm
    X-Y Travel Distance6 inches by 6 inches
    X-Y Motion Accuracy5um
    Needle holder platformThe needle holder platform features a rapid 5mm lifting and lowering stroke, complete with a locking mechanism.
    Back Electrode TestingThe sample stage is electrically isolated and suspended, with a 4mm jack available for connecting the back electrode (optional).
    MicroscopeMicroscope Mounting MethodGantry with X-Y fine adjustment, travel range 2" × 2"
    Microscope PortabilityEquipped with a rapid tilting mechanism for easy objective lens replacement, and featuring a pneumatically operated lifting module with a locking function (optional).
    Microscope TypesSingle-lens microscopeStereo microscopeMetallographic Microscope
    Magnification power0.75x-5x zoom16X-100X20X-4000X
    Light sourceCoaxial light sourceExternal LED Ring Light 
    CCD2-megapixel (upgradable to 20-megapixels)
    Probe holderX-Y-Z Travel Distance12mm x 12mm x 12mm / 20mm x 20mm x 20mm
    Mobile precision10um/2um/0.7um/0.5um
    Adsorption methodMagnetic adsorption / Vacuum adsorption
    Probe FixtureCablesCoaxial cable / Triaxial cable / RF cable
    Leakage current accuracy10pA/100fA/10fA
    Fixed probeSpring fixation / Tubular fixation / Claw-type fixation
    Connector TypeBNC / Three-axis / Banana Plug / Alligator Clip / Terminal Block / RF Connector
    ProbeDC needle tip diameter1um/2um/5um/10um/20um/50um/100um
    RF probe frequency40GHz/50GHz/67GHz/110GHz/1100GHz
    MaterialTungsten steel / Beryllium copper / Nickel-plated
    External dimensions750W x 815D x 650H
    Weight About 80 kilograms 
    Optional accessoriesHeating stageGold-plated chuckHigh-Voltage Testing Accessories
    Seismic-resistant deskShielding boxLaser system
    Customized according to customer requirements