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EMMI Photon Micro-Leakage Analysis Probe Station
EMMI Testing System
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The EMMI Photon Micro-Leakage Localization Analysis System is a crucial tool in integrated circuit failure analysis, as leakage localization is an essential capability for failure analysts. During operation, micro-leakage phenomena are quite common in chips—yet under extreme conditions, even subtle leaks can escalate uncontrollably, potentially leading to chip failure or even complete system-wide malfunctions. Therefore, identifying and analyzing micro-leaks in chips is an exceptionally critical step in the broader process of integrated circuit failure investigation.
To address failure analysis of wide-bandgap semiconductor devices such as GaN and SiC, the company has introduced an EMMI testing system with a response wavelength range of 400 nm to 1000 nm. This advanced system enables precise localization of microamp-level leakage currents in chips—including GaN HEMTs, GaN LEDs, SiC PDs, SiC junctions, Si-based MOSFETs, and ICs. Featuring a spatial resolution better than 1 μm, the system is capable of imaging even extremely faint light signals.
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- Highest quantum efficiency: 82% @ 560 nm
- Effective resolution: 2048×2048
- Effective area: 13.312 mm × 13.312 mm
- Refrigeration temperature: 10°C
- Dark current: 0.6 electrons/pixel/s
- Frame rate: 30Hz
- Wavelength range: 400 nm – 1100 nm
- Interface: USB 3.0