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EMMI Photon Micro-Leakage Analysis Probe Station
EMMI Testing System
- Description
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Applicaton
The EMMI Photon Micro-Leakage Localization Analysis System is a crucial tool in integrated circuit failure analysis, as leakage localization is an essential capability for failure analysts. During operation, micro-leakage phenomena are quite common in chips—yet under extreme conditions, even subtle leaks can escalate uncontrollably, potentially leading to chip failure or even complete system-wide malfunctions. Therefore, identifying and analyzing micro-leaks in chips is an exceptionally critical step in the broader process of integrated circuit failure investigation.
To address failure analysis of wide-bandgap semiconductor devices such as GaN and SiC, the company has introduced an EMMI testing system with a response wavelength range of 400 nm to 1000 nm. This advanced system enables precise localization of microamp-level leakage currents in chips—including GaN HEMTs, GaN LEDs, SiC PDs, SiC junctions, Si-based MOSFETs, and ICs. Featuring a spatial resolution better than 1 μm, the system is capable of imaging even extremely faint light signals.
Description
• 8" high-temperature chuck, with central vacuum hole and multi-ring vacuum adsorption for securing samples, controlled by 3 independent switches.
• Temperature control range: room temperature to 200℃ (optional 300℃, 400℃, 500℃).
• Chuck can rotate 360 degrees, fine adjustment precision no greater than 0.1 degrees, equipped with a locking knob.
• Chuck features a quick-release mechanism for easy sample placement and removal.
• Chuck X/Y axis linear movement, controlled by a large rotary handle, travel range: 8" X 8", movement precision: 1μm, with a locking mechanism.
• Chuck Z-axis lift, with a travel range of 8mm, fine adjustment precision of 2μm, with a locking mechanism.
• Chuck is equipped with an air-bearing system for rapid movement and quick positioning.
• Probe holder platform with quick lift function, travel range of 5mm, with a locking mechanism.
• Probe holder platform fine adjustment lift range: 25mm.
• Probe holder platform can accommodate 8 CB-100 probe holders for simultaneous testing.
• Microscope X-Y movement range: 2" x 2" (microscope not included in the system).
• Equipped with a quick tilt mechanism for easy objective lens changes, with a locking mechanism (optional pneumatic lift available).
• Platform height adjustable to accommodate probe cards, facilitating probe card repositioning.
• Overall dimensions: 750W x 820D x 650H (for reference ).
• Weight: 103KG. -
- Highest quantum efficiency: 82% @ 560 nm
- Effective resolution: 2048×2048
- Effective area: 13.312 mm × 13.312 mm
- Refrigeration temperature: 10°C
- Dark current: 0.6 electrons/pixel/s
- Frame rate: 30Hz
- Wavelength range: 400 nm – 1100 nm
- Interface: USB 3.0