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CH High-End Probe Station
The CINDBEST CH model probe station is a fully functional, highly versatile probe station.
It can accommodate testing of various samples, especially large-sized ones, such as 8-inch wafers, 12-inch wafers, and more.
It can also accommodate testing for various applications, such as DC testing, RF testing, and more.
Testing IV curves, CV curves, LIV curves, RF testing, and high-voltage, high-current tests
CH Series High-End Probe Station
- Description
- Parameters
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Application
- The application scope covers a variety of wafer metrology applications, including Wafer-Level Reliability (WLR), Failure Analysis (FA), Integrated Circuit Engineering, Micro-Electro-Mechanical Systems (MEMS), and High-Power (HP) applications.
- Testing IV curves, CV curves, LIV curves, RF testing, and high-voltage, high-current tests
Ergonomics and Optional Features
- Adjustable needle holder platform allows for quick lifting and lowering, enabling rapid separation of samples and probes.
- Chuck rotates and locks in place
- The needle holder platform accommodates DC/RF positioners (magnetic or vacuum-mounted).
- Offering a variety of configurations, including multiple chuck options, DC/RF/high-voltage 1–10 kV systems, miniature positioners, microscopes, cameras, PCB holders, and more.
Description
• 8" chuck, with central vacuum hole and multi-ring vacuum adsorption for securing samples, controlled by 3 independent switches.
• Chuck can rotate 360 degrees, fine adjustment precision no greater than 0.1 degrees, equipped with a locking knob.
• Chuck features a quick-release mechanism for easy sample placement and removal.
• Chuck X/Y axis linear movement, controlled by a large rotary handle, travel range: 8" X 8", movement precision: 1μm, with a locking mechanism.
• Chuck Z-axis lift, with a travel range of 8mm, fine adjustment precision of 2μm, with a locking mechanism.
• Chuck is equipped with an air-bearing system for rapid movement and quick positioning.
• Probe holder platform with quick lift function, travel range of 5mm, with a locking mechanism.
• Probe holder platform fine adjustment lift range: 25mm.
• Probe holder platform can accommodate 8 CB-100 probe holders for simultaneous testing.
• Microscope X-Y movement range: 2" x 2" (microscope not included in the system).
• Equipped with a quick tilt mechanism for easy objective lens changes, with a locking mechanism (optional pneumatic lift available).
• Platform height adjustable to support probe cards, facilitating probe card repositioning.
• Overall dimensions: 750W x 820D x 650H (for reference only).
• Weight: 103KG.
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Technical specifications Model CH-8 CH-12 Truncated pyramid Chuck size 8 inches 12 inches Sample stage drawer Stroke: 110 mm Stroke: 150 mm Sample stage rotation Rotates 360 degrees, with fine adjustment capability of 15 degrees and precision down to 0.1 degree—equipped with an angle-lock mechanism. Sample Fixing Method Vacuum adsorption, central suction port, multi-ring adsorption ring Sample stage Z-axis lifting and lowering Adjustable by 8mm X-Y Travel Distance 8 inches by 8 inches X-Y Air-Bearing Motion Capable of 360° air-floating movement for quick and easy sample positioning. X-Y Motion Accuracy 1um Needle holder platform Capable of quick 5mm height adjustment and fine-tuning up to 25mm. Back Electrode Testing The sample stage is electrically isolated and suspended, with a 4mm jack available for connecting the back electrode (optional). Microscope Microscope Mounting Method Gantry with X-Y fine adjustment, travel range 2" × 2" Microscope Portability Equipped with a rapid tilting mechanism for easy objective lens replacement, and featuring a pneumatically operated lifting module with a locking function (optional). Microscope Types Single-lens microscope Stereo microscope Metallographic Microscope Magnification power 0.75x-5x zoom 16X-100X 20X-4000X Light source Coaxial light source External LED Ring Light CCD 2-megapixel (upgradeable to 20-megapixels) Other features Loadable laser Probe holder X-Y-Z Travel Distance 12mm x 12mm x 12mm / 20mm x 20mm x 20mm Mobile precision 10um/2um/0.7um/0.5um Adsorption method Magnetic adsorption / Vacuum adsorption DC modulation point angle measurement 0-30° RF angle adjustment
Cables
The multi-point probe features a horizontal adjustment knob that allows for ±10° of fine-tuning, with an accuracy of 0.1 degree. Probe Fixture Coaxial cable / Triaxial cable / RF cable Leakage current accuracy 10pA/100fA/10fA Fixed probe Spring fixation / Tubular fixation / Claw-type fixation Connector Type BNC / Triaxial / Banana Plug / Alligator Clip / Terminal Block / RF Connector Probe DC needle tip diameter 1um/2um/5um/10um/20um/50um/100um RF probe frequency 40GHz/50GHz/67GHz/110GHz/1100GHz Material Tungsten steel / Beryllium copper / Nickel-plated External dimensions 750W x 820D x 650H 925W x 947D x 815H Weight Approximately 103 kilograms Approximately 170 kilograms Optional accessories Heating stage Gold-plated chuck Seismic-resistant desk Shielding box Customized according to customer requirements
CH-8
CH-8