CH High-End Probe Station

The CINDBEST CH model probe station is a fully functional, highly versatile probe station.

It can accommodate testing of various samples, especially large-sized ones, such as 8-inch wafers, 12-inch wafers, and more.

It can also accommodate testing for various applications, such as DC testing, RF testing, and more.

Category:

CH Series High-End Probe Station

Purchase Message

Description
Parameters
Download
Video

Uses
- The application scope covers a variety of wafer metrology applications, including Wafer-Level Reliability (WLR), Failure Analysis (FA), Integrated Circuit Engineering, Micro-Electro-Mechanical Systems (MEMS), and High-Power (HP) applications.
- Testing IV curves, CV curves, LIV curves, RF testing, and high-voltage, high-current tests
Ergonomics and Optional Features
- Adjustable needle holder platform allows for quick lifting and lowering, enabling rapid separation of samples and probes.
- Chuck rotates and locks in place
- The needle holder platform accommodates DC/RF positioners (magnetic or vacuum-mounted).
- Offering a variety of configurations, including multiple chuck options, DC/RF/high-voltage 1–10 kV systems, miniature positioners, microscopes, cameras, PCB holders, and more.

Technical specifications	Model	CH-8		CH-12
Truncated pyramid	Chuck size	8 inches		12 inches
	Sample stage drawer	Stroke: 110 mm		Stroke: 150 mm
	Sample stage rotation	Rotates 360 degrees, with fine adjustment capability of 15 degrees and precision down to 0.1 degree—equipped with an angle-lock mechanism.
	Sample Fixing Method	Vacuum adsorption, central suction port, multi-ring adsorption ring
	Sample stage Z-axis lifting and lowering	Adjustable by 8mm
	X-Y Travel Distance	8 inches by 8 inches
	X-Y Air-Bearing Motion	Capable of 360° air-floating movement for quick and easy sample positioning.
	X-Y Motion Accuracy	1um
	Needle holder platform	Capable of quick 5mm height adjustment and fine-tuning up to 25mm.
	Back Electrode Testing	The sample stage is electrically isolated and suspended, with a 4mm jack available for connecting the back electrode (optional).
Microscope	Microscope Mounting Method	Gantry with X-Y fine adjustment, travel range 2" × 2"
	Microscope Portability	Equipped with a rapid tilting mechanism for easy objective lens replacement, and featuring a pneumatically operated lifting module with a locking function (optional).
	Microscope Types	Single-lens microscope	Stereo microscope		Metallographic Microscope
	Magnification power	0.75x-5x zoom	16X-100X		20X-4000X
	Light source	Coaxial light source	External LED Ring Light
	CCD	2-megapixel (upgradeable to 20-megapixels)
	Other features	Loadable laser
Probe holder	X-Y-Z Travel Distance	12mm x 12mm x 12mm / 20mm x 20mm x 20mm
	Mobile precision	10um/2um/0.7um/0.5um
	Adsorption method	Magnetic adsorption / Vacuum adsorption
	DC modulation point angle measurement	0-30°
	RF angle adjustment Cables	The multi-point probe features a horizontal adjustment knob that allows for ±10° of fine-tuning, with an accuracy of 0.1 degree.
Probe Fixture		Coaxial cable / Triaxial cable / RF cable
	Leakage current accuracy	10pA/100fA/10fA
	Fixed probe	Spring fixation / Tubular fixation / Claw-type fixation
	Connector Type	BNC / Triaxial / Banana Plug / Alligator Clip / Terminal Block / RF Connector
Probe	DC needle tip diameter	1um/2um/5um/10um/20um/50um/100um
	RF probe frequency	40GHz/50GHz/67GHz/110GHz/1100GHz
	Material	Tungsten steel / Beryllium copper / Nickel-plated
External dimensions		750W x 820D x 650H		925W x 947D x 815H
Weight		Approximately 103 kilograms		Approximately 170 kilograms
Optional accessories		Heating stage		Gold-plated chuck
		Seismic-resistant desk		Shielding box
		Customized according to customer requirements