CRX-SM low temperature superconducting vacuum probe station is a fully functional,The probe station has stable structure, convenient operation and strong compatibility. It can meet the test of different samples at different temperatures. The sample size can be less than 2 inches. It is compatible with DC test,Photoelectric testing,Radio frequency testing, superconducting vertical magnetic field measurement and low temperature experiments, etc.

Description:

• The CRX-10K semiconductor device test probe station system comprises the following:

• Closed-cycle cryogenic cooling: 4K base temperature, temperature range: 4.5K to 350K

• Sample stage size: 2 inches

• Electrically isolated sample stage with three coaxial interfaces

• Heaters: 50W sample stage heater, 100W shielded chamber heater

• Infrared radiation shielding window

• Four temperature sensors installed on the sample stage, shielded chamber, cold head, and probe arms

• Six probe arm interfaces (compatible with DC, fiber optic, and RF arms)

• RF arm supports frequency range DC~110GHz

• DC arm leakage current accuracy better than 100fA

• Ultimate vacuum better than 10⁻⁵ Pa

• Integrated vibration-damping mount

• Dimensions: 872*962*1400 mm

• Weight: 130 kg

v	Factory service requirements

Power demand	The power requirement is 220V AC, 380V AC/50Hz, three-phase, the power consumption is 17kW, and the current is 25A.
Performance Indicators	The maximum output power of the three motors is 7.5KW.
Environmental requirements	Operating temperature range is 4-40°C, operating humidity range is 20% to 80%RH
Communication interface	458,232,USB,Ethernet
Gas demand	Helium (replenishment time is once every 12,000 hours)
Installation site	2m3m (table including operating space)There should be no large vibration sources around 1.5m1.5m (compressor and chiller placement area) must have good heat dissipation The table body, compressor and chiller should be placed separately and connected with pipes, the length of which is 20 meters.
Installation Tools	One set of hexagon wrenches (standard), two 12-inch adjustable wrenches

Features

●2 inch sample stage

●The sample stage is electrically independent and suspended,leading to a three-coaxial interface

● Temperature range: 4.5K-350K

●6 probe arm interfaces

●Sample stage vibration accuracy ≤1um

●The RF arm can support the frequency range of DC~110GHz

●Cycle electric refrigeration, no refrigerant required

●Allow unsupervised cooling

● Efficient cooling time

Description

● CRX cryogenic probe station does not require refrigerationAgent, the lowest temperature of the sample stage can reach 4.5K;

● Application areas include: IV / CV / microwave / photoelectric experimental test / superconducting vertical magnetic field measurement / low temperature test;

●Allow unsupervised cooling: cooling can be performed without the need for users to monitor all the time;

●The vibration amplitude of the sample holder is controlled within ≤1um;

●6 probe arm interfaces are compatible with DC arm, RF arm, and fiber optic arm;

●At room temperature, the ultimate vacuum is <7×10^-4 (Torr); at low temperature, the ultimate vacuum is <7×10^-6 (Torr);

● Temperature control stability: better than ±10mK

● Cooling time: ≤3h (from room temperature to 4.5K)

Composition:

● Platform module, probe arm modules,Optical microscope system,Temperature control system,Vacuum system,Low temperature series system

vPlatform module

--Key technical parameters

Temperature range	4.5K/10K-350K
Sample stage size	2 inches
Sample stage vibration amplitude	≤1um
Sample stage type	Grounded sample stage, back electrode sample stage, coaxial sample stage (upgradeable to three-axis sample stage)
Temperature Sensor	4 (located at: chuck, inner cavity, cold head, probe arm)
Temperature control stability	<10 K @ ±50 mK
	10 K to 100 K @ ±10 mK
	100 K to 300 K @ ±10 mK
Vacuum chamber	Cavity diameter 200mm
Observation window diameter	50mm
Vacuum degree	30 min (to reach <5 × 10-3 Torr)
	At room temperature, the ultimate vacuum is <7×10^-4 (Torr)
	At low temperature, the ultimate vacuum is <7×10^-7 (Torr)
Probe station cooling time	＜3h
Probe station temperature recovery time	＜1h
Leakage	<100fA@1V, < 10fA@0.5V
Probe arm interface	6 probe arm interfaces (compatible with DC arm, fiber optic arm, RF arm)
Probe arm travel	X-axis travel: 25mm, Y-axis travel: 70mm, Z-axis effective travel: 15mm
Needle Drop	All probes are available within 1" diameter
Ceramic probe	Ceramic probe, SMA connector
Microscope movement	Microscope X-axis moving range ±50mm, moving accuracy 10um
Microscope resolution	Optical resolution 2um
software	Comes with temperature control software, can control temperature by curve
Dimensions (L x W x H)	Dimensions: 872x962x1400mm (including microscope)
Weight	Weight: 130KG (single unit)

19874522745

miles@cindbest.com

Unit A, 1st Floor, Building 2, Jiayiyuan Digital Science Park, Xinshi Community, Dalang Subdistrict, Longhua District, Shenzhen City

Business license

CRX Cryogenic Closed-loop Probe Station System

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