-
Products
-
-
-
-
-
Contact Us
CT Non-Vacuum Low-and-High Temperature Probe Station
CT Series Non-Vacuum High-Low Temperature
- Description
- Parameters
- Download
- Video
-
Equipment Application
CINDBEST CT series high and low temperature probe station. CT series can realize specific temperature testing in high and low temperature non-vacuum environment. It is mainly used in the manufacturing and research fields of integrated circuits, LEDs, LCDs, solar cells, and semiconductor industries. In high and low temperature environments, LD/LED/PD testing, PCB/packaged device testing, IV/CV characteristic testing of materials/devices, internal circuit/electrode/PAD testing of chips above 0.2 microns, high frequency, RF testing, etc.
Features
The CINDBEST CT Series Non-Vacuum High/Low Temperature Probe Station is a fully-featured, highly-compatible probe station capable of accommodating diverse sample testing requirements and various applications, including DC testing, RF testing, and more. The probe station features a sealed chamber design that shields against external electromagnetic interference while maintaining a nitrogen-pressurized environment to prevent sample frosting at low temperatures. Its stable structure and user-friendly operation incorporate multiple functions including a sealed chamber, high/low-temperature chuck, sample stage movement, microscope movement, sample stage elevation, sample stage rotation, probe holder platform elevation, and microscope tilt, providing highly convenient testing operations. The gantry structure facilitates interchangeability between metallurgical microscopes, stereo microscopes, and other microscope types while ensuring precise microscope positioning for optimal sample observation. The needle holder platform elevation mechanism improves operational methods and enhances testing efficiency.
Description
• 6" chuck, with a flatness of 5um, uses a central adsorption hole and multiple-ring adsorption rings to fix the sample. It can be used to test 6-inch, 4-inch and smaller wafers or chips. The three rings are independently controlled, and the central adsorption hole can be selected to be as small as 250 microns
• The U-shaped needle base placement platform is fine-tuned to lift and lower by 25mm with an accuracy of 1um, adjusted by a handwheel
• The travel of the chuck table in the X/Y direction is 6 inches * 6 inches, with an accuracy of 10 microns, both with locking knobs
The microscope adjustment system adopts a gantry structure, driven by dual screw rod guides, with an X-Y stroke of 2 inches by 2 inches and a movement accuracy of 1 micron
• Rapid tilt and pitch structure for easy switching of objectives, with built-in locking (optional microscope pneumatic lifting function)
• The lift adjustment is suitable for adding probe cards
• The enlarged U-shaped table can accommodate 10 probe holders at the same time
Using a closed chamber structure, it shields external telecommunications interference while maintaining a positive nitrogen pressure environment to prevent frosting of the sample at low temperatures
• The optimized cavity insulation structure can greatly reduce the consumption of liquid nitrogen
Overall dimensions: 830 * 750 * 290. Dimensions are (for reference only)
Weight: 150KG -
●8" chuck, samples central suction, holes and multi-ring suction, each independently controlled by 3 switches.
●Temperature range: -60°C to 200°C (in liquid nitrogen environment), -40°C to 200°C (in air-cooled unit environment). Chuck rotates 360 degrees with fine adjustment accuracy ≤0.1°C, featuring a locking knob. Quick-release chuck facilitates sample loading/unloading. X/Y-axis linear movement with large-handle rotary control. Travel: 8 inches x 8 inches (3 inches x 3 inches in liquid nitrogen environment), accuracy: 10 microns, both with locking knobs. The chuck incorporates air-bearing rapid traverse for precise positioning and utilizes a sealed chamber structure.
● Shields external telecommunication interference while maintaining a nitrogen positive-pressure environment to prevent sample frosting at low temperatures (in air-cooled systems). Expanded ring-shaped platform accommodates 8 probe holders simultaneously.
● Platform micro-adjustment range: 25mm vertical travel. with 5mm rapid travel. Optimized chamber insulation significantly reduces liquid nitrogen consumption. Microscope X-axis travel: 2“ x 2” (microscope not included).
● Overall dimensions: 830mm x 750mm x 290mm (dimensions for reference only).
● Weight: 180kg.