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CP Series Semi-Automatic Probe Station
CP 200/300 Semi-Automatic Probe Station
Multi-magnification Optical Display System
Compatible with 12”, 8”, 6”, and 4” wafer testing and dicing tests
Internal air suspension system effectively isolates external vibrations.
Integrated control system for rapid access to instrument testing
Software automation testing, precise calibration of mechanical accuracy
X-Y axis travel speed: 70 mm/sec, repeat positioning accuracy: ≤±1 μm
Z-axis travel speed: 20 mm/sec, Z-axis positioning repeatability: ≤ ±μm
R-axis accuracy: 0.0001°, repeat positioning accuracy: ≤±1 μm